A REVIEW OF LAST DEVELOPMENTS IN THIN FILMS PARAMETERS OF DIRECT CURRENT SPUTTERING FOR OPTICAL AND BIOMEDICAL APPLICATIONS
DOI:
https://doi.org/10.22159/ijms.2021.v9i3.41048Keywords:
Direct Current (DC) Sputtering, Coating, Nano Thickness, FilmsAbstract
Nano thin films and nano coating have been applied in different fields in health care system because of their higher antiviral properties. Additionally, as the world have suffered since December 2019 from Covid-19 situation, different scientists and industrials people have tried to apply nano antiviral films and coatings in our daily life. In this short review, nano thin film coating procedure by DC sputtering technique has been reviewed, investigated, and evaluated by using different materials and device parameters in recent years. This report focuses on device factors that affect the thickness of nano-thin films for optical and optic-electric applications. These parameters including time, temperature, power, pressure, and flow rate of gases. The review provides more understanding meaning of the coating procedure by DC sputtering process.
References
Dornhof J, Urban GA, Kieninger J. Deposition of copper nanofilms by surface-limited redox replacement of underpotentially deposited lead on polycrystalline gold. J Electrochem Soc 2018;166:D3001.
Beyene HT, Tichelaar FD, Verheijen MA, van de Sanden MC, Creatore M. Plasma-assisted deposition of Au/SiO2 multi-layers as surface plasmon resonance-based red-colored coatings. Plasmonics 2011;6:255-60.
Kylián O, Kratochvíl J, Hanuš J, Polonskyi O, Solař P, Biederman H. Fabrication of Cu nanoclusters and their use for production of Cu/plasma polymer nanocomposite thin films. Thin Solid Films 2014;550:46-52.
Liu Y, Leng J, Wu Q, Zhang S, Teng X. Investigation on the properties of nano copper matrix composite via vacuum arc melting method. Mater Res Express. 2017;4:106512.
Ehiasarian A, Pulgarin C, Kiwi J. Inactivation of bacteria under visible light and in the dark by Cu films. Advantages of Cu-HIPIMS-sputtered films. Environ Sci Pollut Res 2012;19:3791-7.
Jia ZN, Hao CZ, Yang YL. Tribological performance of hybrid PTFE/ serpentine composites reinforced with nanoparticles. Tribol Mater Surf Interfaces 2014;8:139-45.
Oh Y, Kim EJ, Kim Y, Choi K, Han WB, Kim HS, et al. Adhesion of sputter-deposited Cu/Ti film on plasma-treated polymer substrate. Thin Solid Films 2016;600:90-7.
Zakharov AN, Kovsharov NF, Oskomov KV, Rabotkin SV, Solovyev AA, Sochugov NS. Properties of low-emission coatings based on Ag and Cu deposited on polymer film by magnetron sputtering. Inorg Mater 2012;3:433-9.
Wang QJ, Chung YW. Encyclopedia of Tribology. Berlin: Springer; 2013.
Zhang Z, Hu Y, Qin F, Ding Y. DC sputtering assisted nano-branched core-shell TiO2/ZnO electrodes for application in dye-sensitized solar cells. Appl Surf Sci 2016;376:10-5.
Aragón FH, Aquino JC, Gomes NC, Ardisson JD, da Silva SW, Pacheco- Salazar DG, et al. Characterization of polycrystalline SnO2 films deposited by DC sputtering technique with potential for technological applications. J Eur Ceramic Soc 2017;37:3375-80.
Park JH, Shin BK, Moon HM, Lee MJ, Park KI, Ahn KJ, et al. Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target. Vacuum 2012;86:1423-7.
Hsu FH, Wang NF, Tsai YZ, Chuang MC, Cheng YS, Houng MP. Study of working pressure on the optoelectrical properties of Al-Y codoped ZnO thin-film deposited using DC magnetron sputtering for solar cell applications. Appl Surf Sci 2013;280:104-8.
Abe Y, Ishiyama N, Kuno H, Adachi K. Amorphous indium tungsten oxide films prepared by DC magnetron sputtering. J Mater Sci 2005;40:1611-4.
Rashid H, Rahman KS, Hossain MI, Nasser AA, Alharbi FH, Akhtaruzzaman M, et al. Physical and electrical properties of molybdenum thin films grown by DC magnetron sputtering for photovoltaic application. Results Phys 2019;14:102515.
Jin-Hua G, Jia-Le S, Jiu-Xiu W, Ya-Yang F, Xiao-Yong G, Jing-Xiao L. Indium-tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications. Chin Phys B 2015;24:117703.
Published
How to Cite
Issue
Section
Copyright (c) 2021 Akram Jawad
This work is licensed under a Creative Commons Attribution 4.0 International License.
